Wafer Geometry Inspector

EFEM - Equipment Front End Module

Using the Equipment Front End Module designed by KoCoS, the WGI 300 measuring system can be integrated in fully automatic manufacturing processes. This module features 2 load ports and has been developed to meet the very latest standards which apply to the manufacture of 300 mm wafers, including full compliance with clean room conditions.

Setup

• 2 load ports (optionally 3)
• Pre-aligner with optical notch detection
• Handling system with 3-axis robot
• Passive edge grip systems
• Flow unit with U16 filter, adjustable air flow and variable outlets
• Weight approx. 350 kg