APPLICATIONS

Wafer Geometry Inspector

Measurement procedure

When a wafer is loaded, the sensors and the area scan camera system move into measurement position. The sensors are mounted on precision linear stages for this purpose.

The wafer is rotated once by 360° in order to locate the notch position. The area scan camera system determines the wafer circumference and its excentricity at the same time.

The edge profiles are recorded one after another by the light-sectioning sensors at the pre-defined measurement positions.