APPLICATIONS

Wafer Geometry Inspector

Edge tests according to SEMI T3/T4

SEMI guidelines define stan-dardised tests for the assessment of edge profiles. These tests involve area elements with a constant spatial relationship to one another being projected onto the edge profile. In order to be given a positive assessment, the contour of the wafer edge must not intersect these area elements.

Using the WGI 300 measuring system, an edge test in accordance with SEMI T3 and T4 guidelines can be carried out automatically for every wafer.